Molecular beam epitaxy chamber (right-hand side):

• 4-Pocket electron beam evaporator
• Two effusion cells
• Five evaporators
• Electrospray ion beam deposition unit
• Oxygen plasma source
• Reflection high energy electron diffraction
• Sample heating and cooling

Analysis chamber (left-hand side):

• Variable temperature (25-800K) scanning probe microscope
• Electron energy analyser for photoelectron spectroscopy
• UV-radiation source for UPS
• X-ray source for XPS
• Low energy electron diffraction
• Ion sputtering gun
• Fast entry load lock
• Sample heating and cooling

STM chamber (left-hand side):

• Variable temperature (1.6 - 300K) scanning tunneling microscope
• 3D vector magnet (vertical 6 T, horizontal 1 T, 2+1T  in combined operation)
• Optical access to the STM head

Analysis chamber (right-hand side):

• Low energy electron diffraction (LEED)
• 3 evaporators for metals and molecules
• Ion sputtering gun
• Fast entry load lock
• Sample heating and flash-annealing

Laboratory (ZS Building):

• Separated foundation for the STM system (35 t concrete block)
• Separated technical room for pumps
• Special ventilation and air conditioning system

⁴He magnetotransport setup with vector coil system

• Magnetic fields: ± 1 T
• Temperature: 4.2 to 300 K

³He/⁴He magnetotransport setup

• Magnetic fields: ± 14 T
• Temperature: 300 mK to 300 K

High frequency setup for magnetotransport measurements

• Magnetic fields: ± 0.5 T
• Temperature: 4.2 to 300 K